
Gold/ Copper Thin Film Magnetron Sputtering Coating Machine / Nylon Textile Cu Conductive Film Coating Unit
1. Nylon Textile Copper Magnetron Sputtering Vacuum Coater
1) Film thickness controllability and well repeatability,can be a reliable system of pre-plated thickness of the films and sputtering in a larger surface of uniform film;
2) The adhesion of the film and the substrate is very well. Some of the high energy of sputtered atoms to produce different levels of injection phenomenon, pseudo-diffusion layer formed on the substrate layer of sputtered atoms and substrate atoms fused with each other;
3) Preparation of special material of the film, you can use different materials and sputtering hybrid film, compound film,also can be sputtered into the TiN imitation gold film.
2. Nylon Textile Copper Magnetron Sputtering Vacuum Coater Specifications
Magnetron Sputtering Coating Machine | ||||||
Performance | RTSP-700 | RTSP-900 | RTSP-1000 | RTSP-1250 | RTSP-1400 | RTSP -1600 |
Size of coating chamber | 700*H900mm | 900*H1100mm | 1000*H1200mm | 1250*H1350mm | 1400*H1600mm | 1600*H1800mm |
Power supply type | Filament power supply, pulse bias power supply, DC magnetron power supply, intermediate frequency magnetron power supply, radio frequency magnetron power supply, linear ionization source | |||||
Structure of vacuum chamber | Vertical double door, vertical front door structure, rear air exhaust system | |||||
Material of vacuum chamber | High-quality stainless steel cavity | |||||
Limit vacuum | 6.0*10-4Pa | |||||
Pump-down time (no-load) | Pump the atmosphere to 8.0*10-3>Pa ≤15 minutes | |||||
Vacuum acquisition system | Diffusion pump or molecular pump + Roots pump + Mechanical pump + rotary vane pump (the specific model can be configured according to customer requirements) | |||||
Coating mode | Magnetron sputtering coating | |||||
Film type | Metal film, reactive film, compound film, multilayer film and semiconductor film | |||||
Magnetron target type | Rectangular magnetron target, cylindrical magnetron target and twin magnetron targets | |||||
Magnetron supply power and number of magnetron targets | Select according to different coating process and customer requirements | |||||
Bias power supply | 10KW/1 unit | 20KW/1 unit | 20KW/1 unit | 30KW/1 unit | 40KW/1 unit | 50KW/1unit |
Rotating mode of workpiece turntable | Planetary revolution and autorotation, variable frequency speed regulation (controllable and adjustable) | |||||
Process gas | 3-path or 4-path process gas flow control and display system, selective automatic gassing system | |||||
Cooling mode | Water circulation cooling mode, cooling water tower or industrial water cooler or deep cooling system. (Provided by customers) | |||||
Control mode | Manual/automatic integration mode, touch screen operation, PLC or computer control | |||||
Total power | 30KW | 35KW | 40KW | 50KW | 65KW | 80KW |
Alarm and protection | Alarm water shortage, overcurrent and over-voltage, open circuit and other abnormal conditions of pumps, targets and so on and execute relevant protective measures and electric interlock function | |||||
Equipment area | W2m*L3m | W2.5m*L3.5m | W3m*L4m | W4m*L5m | W4.5m*L6m | W5m*L7m |
Other technical parameters | Water Pressure ≥0.2MPa, Water Temperature ≤25°C, Air Pressure: 0.5-0.8MPa | |||||
Remarks | The specific configuration of coating equipment can be designed according to process requirements of coating products |
Nylon Textile Copper Magnetron Sputtering Vacuum Coating Sample
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.
SHANGHAI ROYAL TECHNOLOGY INC.
Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.
Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:
Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.
RTAS model,the arc and sputtering integrated series equipment can produce highly reflective black and bronze films specifically for high quality decorative coatings.
RTSP1200-FCEV, It is a sputtering system with PECVD process to deposit thin film on hydrogen fuel cell power modules. Fuel Cell Vehicles is the newest technology for the next generation of environmentally friendly cars. The main advantage and technological progress compared to commonly used batteries like dry cell need to undergo a recurring recharging process, but hydrogen fuel cell power modules only require Hydrogen and Oxygen reaction to generate power for driving.
RTSP1200-DPC,This coating system is exclusively used for the DPC (Direct Plating Copper) ceramic substrates process. The DPC ceramic substrates are widely used in various applications: for instance in high brightness LED to increase the longevity because of its high heat radiation performance, Semiconductor equipment, in microwave wireless communication, military electronics, various sensor substrates, aerospace, railway transportation, electricity power and much more.
RT-CsI950, Evaporation coating plant is applied to CsI film deposition for X-Ray Imaging devices. It is an advanced technique to evaporate CsI on the screen to create high quality images. The high-resolution performance allows this application to be extremely efficient and disruptive in the medical instrument, nuclear energy industry, security checking and inspection, high energy physics subjects and more.
Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.
Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.
ROYAL TECHNOLOGY'S CULTURE
ROYAL's Vision: to be the worldwide famous brand supplier of providing total solutions to customers requirement.
ROYAL' Mission: protects the environment, saves our blue planet ; to improve labors tough working environment, enhance work efficiency, completely help owners to reduce production cost.
ROYAL's Philosophy: human-oriented, honest, innovative and make the greatest contribution to society.
ROYAL's Value: innovation, advanced technology’s R&D, serving China and worldwide's manufacturing industries.
ROYAL's Service: ONE-STOP service, with excellent technology and products, professional dedication to serve our customers.