
The RTAS series is an integrated multiple deposition sources machine to general
graphite, jet black, blue, copper and bronze colors on metal parts,
stainless steel objects. Particularly used for high end class
luxury parts.
Standard Application
Jewelry, watch straps and bodies, Stainless steel sports, Writing instruments
Consumer electronics: Mobile Phone, Laptop, Camera, Drones
The RTAS machines equipped with circular arc and cylinder
sputtering deposition sources. Multiple combinations of DC
sputtering, MF sputtering, arc evaporation and Ion source etc. All
are available in one single machine, for a high flexibility in
configurations to satisfy various applications. Especially for
small components aesthetic coatings: jet black, copper, brass and
chrome colors.
What is MF Sputtering?
Compared with DC and RF sputtering, Mid-Frequency sputtering has become a main thin film sputtering technique for mass production of coating, particularly for the film deposition of dielectric and non-conductive film coatings on surfaces such as optical coatings, solar panels, multiple layers, composite material film etc.
It is replacing RF sputtering due to it operated with kHz rather than MHz for a much faster deposition rate and also can avoid the Target poisoning during compound thin film deposition like DC.
MF sputtering targets always existed with two-sets. Two cathodes
are used with an AC current switched back and forth between them
which cleans the target surface with each reversal to reduce the
charge build up on dielectrics that leads to arcing which can spew
droplets into the plasma and prevent uniform thin film growth—
which is what we called Target Poisoning.
Technical Specificaitons
No. | Name |
1 | Vacuum Pumping System : Turbo Molecular pump + Roots Pump+ Mechanical Pump + Holding Pump |
2 | Vacuum Measuring System: Pirani + Penning Gauges |
3 | Heating System: heaters for substrates heating up to improve the adhesion |
4 | Water/Compressed Air Distribution System: modular design and fabaricated |
5 | Cylinder Sputtering Cathodes: 2/4/6/8 pairs of twins targets for option |
6 | Vacuum Gate Valve ( as option) |
7 | Electrical Enclosure (CE standard) |
8 | Vacuum Chamber (SS304/316L as requested) |
9 | Cathodic Arc Source (conventional arc cathodes ) |
10 | View Port ( 2 distributed on the door for inspection inside of deposition chamber ) |
11 | Processing Gas Distribution System ( Meter Flow Controller for 4 channels ) |
12 | Rack Driving System ( planetary driving model) |
13 | Carousel |
Description | RTAS1250 | RTAS1612 |
Deposition Chamber (mm) | φ1250 * H1250 | φ1600 * H1250 |
Planetary Driving Effective Coating Area (mm) | 8: φ270*H850 10: φ230*H850 | 10: φ300*H850 16: φ200*H850 |
Circular Arc Cathode (sets) | 7 | 12 |
Cylinder Sputtering Cathodes (pairs) | 3 /4 | 4 / 6 |
Pulsed Bias Power (KW) | 36 | 48 |
DC / MF Sputtering Power (KW) | 36 | 4*36 |
Arc Power (KW) | 7*5 | 12*5 |
Vacuum Pumps | 2* Turbo Molecular Pumps 1*SV300B 1*WAU1001 1*TRP60 | 3* Turbo Molecular Pumps 2*SV300B 1*WAU2001 1*TRP90 |
Max. Power Consumption (KW) | 200 | 245 |
Average Power Consumption(KW) | <75 | <100 |
Operation Space (L*W*H) mm | 4300*3700*2800 | 5000*4000*2800 |
Flexible configurations: the machine is set according to coating
processes and customers’ requirements
Insite
SHANGHAI ROYAL TECHNOLOGY INC.
Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.
Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:
Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.
RTAS model,the arc and sputtering integrated series equipment can produce highly reflective black and bronze films specifically for high quality decorative coatings.
RTSP1200-FCEV, It is a sputtering system with PECVD process to deposit thin film on hydrogen fuel cell power modules. Fuel Cell Vehicles is the newest technology for the next generation of environmentally friendly cars. The main advantage and technological progress compared to commonly used batteries like dry cell need to undergo a recurring recharging process, but hydrogen fuel cell power modules only require Hydrogen and Oxygen reaction to generate power for driving.
RTSP1200-DPC,This coating system is exclusively used for the DPC (Direct Plating Copper) ceramic substrates process. The DPC ceramic substrates are widely used in various applications: for instance in high brightness LED to increase the longevity because of its high heat radiation performance, Semiconductor equipment, in microwave wireless communication, military electronics, various sensor substrates, aerospace, railway transportation, electricity power and much more.
RT-CsI950, Evaporation coating plant is applied to CsI film deposition for X-Ray Imaging devices. It is an advanced technique to evaporate CsI on the screen to create high quality images. The high-resolution performance allows this application to be extremely efficient and disruptive in the medical instrument, nuclear energy industry, security checking and inspection, high energy physics subjects and more.
Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.
Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.
ROYAL TECHNOLOGY'S CULTURE
ROYAL's Vision: to be the worldwide famous brand supplier of providing total solutions to customers requirement.
ROYAL' Mission: protects the environment, saves our blue planet ; to improve labors tough working environment, enhance work efficiency, completely help owners to reduce production cost.
ROYAL's Philosophy: human-oriented, honest, innovative and make the greatest contribution to society.
ROYAL's Value: innovation, advanced technology’s R&D, serving China and worldwide's manufacturing industries.
ROYAL's Service: ONE-STOP service, with excellent technology and products, professional dedication to serve our customers.