PVD Functional Coatings- Gold Sputtering Thin Film Deposition System

Gold has a bright, reddish-yellow color in its purest form. It does not oxidize in the air at room temperature, so it remains very stable under normal conditions and its electrical conductivity is constant. It is one of the most common precious metals used in finishing.

Gold is corrosion resistant, which makes it a good finish for connector pins and electrical switch contacts.

Gold plating is used in parts and components across a wide range of main industries:

1. Medical applications: body implants
2. Energy: hydrogen fuel cell Bipolar plates
3. Semiconductor: microelectronic chips
4. Aerospace & defense
5. Telecommunications and other more

ROYAL Technology supplies turnkey coating solutions for manufactures who are looking for a reliable team for long term cooperation.

Robust design, large batches, fast cycle, flexible coating processes are the basic design concepts ROYAL Team has been pursuing.

Design Advantages

1. Energy saving: compact design and molecular pumps are applied
2. High target utilization up to 40% with planar sputtering cathode
3. Sputtered Au gold film’s thickness is controllable
4. One-Touch operation system

PVD Gold sputtering deposition

1. When comes to glass, metal alloys etc. Substrates material, the bonding layer is essential to enhance substrate and Aufilm adhesion. Royal Technology has developed a range of matured coating recipes based on different applications, support our customers with professional advice.
2. The roughness (RMS – root mean square) < 40Å is expected for most of the applications. For certain scanning probe applications a lower roughness might be required, generally 1.5 ~ 4 nm.
3. Gold sputtering layer surface purity: a clean surface is required for applications that employ gold surface modifications. Depending on the PVD process used, level of vacuum in the system, original purity of the gold source (over 99.99% generally)
   
   

   Technical Specifications:

   MODEL: RTSP800

   TECHNOLOGY: DC Sputtering + Ion source (for option)

   MATERIAL: Stainless Steel

   CHAMBER SIZE: Φ800*H800mm

   CHAMBER TYPE: Cylinder, vertical, 1-door

   ROTARY RACK SYSTEM: Planetary/Central driving

   DEPOSITION MATERIAL: Gold, Aluminum, Silver, Copper, Chrome, Stainless Steel, Nickel, Titanium

   DEPOSITION SOURCE: Planar Sputtering Cathodes,

   Conventional arc cathodes for option(according to the coating process’s requirement)

   REACTIVE GAS CONTROL: MFC, 2/4 ways

   CONTROL PLC(Programmable Logic Controller) +IPC

   PUMP SYSTEM:
   SV300B – 1 set (Leybold) 300m³/hr

   Roots Pump – 1 set, 490m³/hr

   Holding Pump – 1 set, 60m³/hr

   Turbo Molecular Pump: – 1 set, 3500L/S

   POWER SUPPLY: Bias power supply: 1*24 KW

   DC sputtering power: 12KW

   Linear Ion source: 5KW

   SAFETY SYSTEM:Numerous safety interlocks to protect operators and equipment

   COOLING Recycle: Cooling Water

   HEATING: Heaters, 9KW

   POWER ELECTRICAL:
   480V/3 phases/60HZ ( USA compliant)

   460V/3 phases/50HZ ( Asia compliant)

   380V/3 phases/50HZ ( EU-CE compliant)

   FOOTPRINT: L3200*W2600*H2000mm

   TOTAL WEIGHT: 4.0 T

   CYCLE TIME: 30~40 minutes (depending on substrate material, substrate geometry and environmental conditions)

   POWER MAX: 50KW

   AVERAGE POWER CONSUMPTION (APPROX.): 20KW

   

Insite

Please contact us for more information, we are always open to communicate and share with you the advanced techniques.

Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.

 Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:

Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.

RTAS model,the arc and sputtering integrated series equipment can produce highly reflective black and bronze films specifically for high quality decorative coatings.

RTSP1200-FCEV, It is a sputtering system with PECVD process to deposit thin film on hydrogen fuel cell power modules. Fuel Cell Vehicles is the newest technology for the next generation of environmentally friendly cars. The main advantage and technological progress compared to commonly used batteries like dry cell need to undergo a recurring recharging process, but hydrogen fuel cell power modules only require Hydrogen and Oxygen reaction to generate power for driving.

RTSP1200-DPC,This coating system is exclusively used for the DPC (Direct Plating Copper) ceramic substrates process. The DPC ceramic substrates are widely used in various applications: for instance in high brightness LED to increase the longevity because of its high heat radiation performance, Semiconductor equipment, in microwave wireless communication, military electronics, various sensor substrates, aerospace, railway transportation, electricity power and much more.

RT-CsI950, Evaporation coating plant is applied to CsI film deposition for X-Ray Imaging devices. It is an advanced technique to evaporate CsI on the screen to create high quality images. The high-resolution performance allows this application to be extremely efficient and disruptive in the medical instrument, nuclear energy industry, security checking and inspection, high energy physics subjects and more.

Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.

     Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.

ROYAL TECHNOLOGY'S CULTURE

ROYAL's Vision:  to be the worldwide famous brand supplier of providing total solutions to customers requirement.

ROYAL' Mission: protects the environment, saves our blue planet ; to improve labors tough working environment, enhance work efficiency, completely help owners to reduce production cost.

ROYAL's Philosophy: human-oriented, honest, innovative and make the greatest contribution to society.

ROYAL's Value: innovation, advanced technology’s R&D, serving China and worldwide's manufacturing industries.

ROYAL's Service: ONE-STOP service, with excellent technology and products, professional dedication to serve our customers.