Tantalum (Ta)Thin Film Magnetron Sputtering Deposition System-RTSP1000

Deposition of Tantalum, Gold precious metals by Sputtering

Sputtering is widely used to deposit refractory metals like tantalum, titanium, tungsten, niobium, which would require very high temperatures of deposition, and precious metals: Gold and Silver and which is also used for deposition of lower melting points metals like copper, aluminum, nickle, chrome etc.

Tantalum is most used in the electronic industry as a protective coating because of its good resistance to erosion.

Sputtered tantalum films are widely used in the
1. Microelectronics industry as the films can be reactively sputtered and thus resistivity and temperature coefficient of resistance can be controlled;

2. Medical instruments like body implants for its highly biocompatability property;

3. Coatings on corrosion resistant parts, such as thermowells, valve bodies, and fasteners;

4. Sputtered tantalum can be also be used as an effective corrosion resistance barrier if the coating is continuous, defected and is adherent to the substrate is intended to protect.

Royal Technology’s standardized Tantalum sputtering deposition system: RTSP1000 model.
Tantalum sputtered film properties:
Low resistivity

High corrosion and wear resistant coatings on surface that are subjected to high stresses and harsh chemical and erosive environment.

Design features:

Robust Design, Stable Quality, Fast Cycle, High Precision System

Equipment Structure:

Coating System Structure: Vertical orientation, octagonal structure, 2 doors for easy access.

Environmentally friendly system, no hazardous wastes.

Total integration, modular design
Commercialized and standardized for industrial mass production
Extremely efficient ion source for strong adhesion and high ionization.
Easy Operation: Touch screen + PLC control, one touch operation
Special design of Carousel system for high uniformity deposition.
High productivity and stability, working 24/7 a week.
Flexible, matches to various sizes of plates

Key components

Ion source for assisted depositon process:

Ion source for plasma iteching process:

The RT1200-FCEV machine is a batch model sputtering system, which can deposit various hard coatings, soft coatings, compound films and solid lubricating films on the metallic and non-metallic materials substrates. Applied to industries of Hydrogen Fuel Cell vehicles, photonic products, aerospace and other new energy industries.

Performances of the deposition films:

To improve the conductivity of surface;

High corrosion resistance;

High wear resistance;

High hardness

Hydrophobic composition film and other functional films

Available for compound coatings: metallic and non-metallic films.

Film thickness range from 100nm to 12μm, thickness tolerance ±5%

Strong adhesion.

Low tempering parts surface hardening treatment.

Type:

Vertical orientation, octal structure, 2-doors (front and back)

Design advantages:

• Environmentally friendly system, no industrial waste water, air and noise pollution;
• Easy Operation: Touch screen + PLC control and unique software program for one touch operation, more than 80% trouble shootings alarm.
• Up to 10 processing recipes login and backup; high repeatability and diversity.
• Special design of Carousel system for high uniformity of film deposition.
• High productivity and high quality
• Stable and reliable system, running 365 days * 24hrs (maintenance and repair breaking time)
• Efficiency pumping system: shorter vacuum piping lines for maximum piping speed with well known European pump brands
• Compact design occupy minimum installation space.

Contact us for more details. Royal Tech team is honored to serve you with our best service and knowleage.

Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.

 Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:

Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.

RTAS model,the arc and sputtering integrated series equipment can produce highly reflective black and bronze films specifically for high quality decorative coatings.

RTSP1200-FCEV, It is a sputtering system with PECVD process to deposit thin film on hydrogen fuel cell power modules. Fuel Cell Vehicles is the newest technology for the next generation of environmentally friendly cars. The main advantage and technological progress compared to commonly used batteries like dry cell need to undergo a recurring recharging process, but hydrogen fuel cell power modules only require Hydrogen and Oxygen reaction to generate power for driving.

RTSP1200-DPC,This coating system is exclusively used for the DPC (Direct Plating Copper) ceramic substrates process. The DPC ceramic substrates are widely used in various applications: for instance in high brightness LED to increase the longevity because of its high heat radiation performance, Semiconductor equipment, in microwave wireless communication, military electronics, various sensor substrates, aerospace, railway transportation, electricity power and much more.

RT-CsI950, Evaporation coating plant is applied to CsI film deposition for X-Ray Imaging devices. It is an advanced technique to evaporate CsI on the screen to create high quality images. The high-resolution performance allows this application to be extremely efficient and disruptive in the medical instrument, nuclear energy industry, security checking and inspection, high energy physics subjects and more.

Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.

     Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.

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