
PVD Ion plating/coating machine,Thin Film Coating Machine
APPLICATION
It can be used to coat metal film, titanium nitride, titanium
carbide, and zirconium nitride, chromium nitride and titanium,
nickel, chromium, copper , and other compounds film, multi-layer
super-hard film, nitrogen-doped titanium film and the alloy film (
TiN, TiC, TiCN, TiAlN, CrN, Cu, Au, Al2O3and other decorative films
etc.) and in a very short time to complete all the machining
process, it is a highly efficient multi-functional coating
equipment.
This machine is extensively used in the fields of decorative
coating for stainless steel, ceramic tile/cups, computer, mobile
phone, watch& jewelry, sanitary, home appliance, hotel products
etc.
FEATURES
It has the reliable work, good repeatability and consistency., fast
deposition rate, high adhesion, fine film, etc. The coating film is
dense and hardness with low friction coefficient, to keep the
smoothness of original workpiece surface, good flexibility, hard to
break and fall.
The equipment makes full automation of the coating technology come
true. It uses the vacuum coating technique to coat on the surface
of the base material. It has the features of low cost, high
qualification rate, green environmental protection etc.
Thin Film Coating Machine Models
Model | RTAC-900 | RTAC-1000 | RTAC-1250 | RTAC-1400 | RTAC-1600 | ||||
Chamber Inner size | 900x1100mm | 1000x1200mm | 1250x1350mm | 1400x1600mm | 1600x1600mm | ||||
Power supply type | Arc power supply, filament power supply, pulse bias power supply | ||||||||
Structure of vacuum chamber | Vertical front door structure, rear air exhaust system and double-layer water cooling chamber | ||||||||
Material of vacuum chamber | stainless steel 304/316L | ||||||||
Ultimate vacuum | 6.0x10-4Pa (unloading, clean, drying chamber) | ||||||||
Vacuum Pumping Speed | from atmosphere to 8.0*10-3Pa ≤15 minutes | ||||||||
Vacuum pumping system | Diffusion pump or molecular pump + Roots pump + Mechanical pump +
Holding pump (the specific model can be selected according to customer requirements) | ||||||||
Arc source | 6 units or 8 units | 8 units or 10 units | 10 units or 12 units | 14 units or 16 units | 16 units or 18 units | ||||
Bias power supply | 20KW/set | 20KW/set | 30KW/set | 40KW/set | 50KW/set | ||||
Driving Model | Planetary revolution and rotation, variable frequency speed
regulation (controllable and adjustable) | ||||||||
Heating System | Controllable and adjustable from room temperature to 450°C (PID temperature control) | ||||||||
MFC | 3-path or 4-path process gas flow control and display system, selective automatic gassing system | ||||||||
Cooling System | Water circulation cooling mode, cooling water tower or industrial water cooler or deep cooling system. (Provided by customers) | ||||||||
Control mode | Manual/automatic integration mode, touch screen operation, PLC or computer control | ||||||||
Total power | 30KW | 35KW | 45KW | 60KW | 75KW | ||||
Alarm and protection | Alarm water shortage, over current and overvoltage, open circuit and other abnormal conditions of pumps, targets and so on and execute relevant protective measures and electric interlock function | ||||||||
Equipment area | W2.5m*L3.5m | W3m*L4m | W4m*L5m | W4.5m*L6m | W5m*L7m | ||||
Other technical parameters | Water Pressure ≥0.2MPa, Water Temperature ≤25°C, Air Pressure 0.5-0.8MPa | ||||||||
Remarks | The specific configuration of coating equipment can be designed according to process requirements of coating products |
SHANGHAI ROYAL TECHNOLOGY INC.
Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.
Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:
Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.
RTAS model,the arc and sputtering integrated series equipment can produce highly reflective black and bronze films specifically for high quality decorative coatings.
RTSP1200-FCEV, It is a sputtering system with PECVD process to deposit thin film on hydrogen fuel cell power modules. Fuel Cell Vehicles is the newest technology for the next generation of environmentally friendly cars. The main advantage and technological progress compared to commonly used batteries like dry cell need to undergo a recurring recharging process, but hydrogen fuel cell power modules only require Hydrogen and Oxygen reaction to generate power for driving.
RTSP1200-DPC,This coating system is exclusively used for the DPC (Direct Plating Copper) ceramic substrates process. The DPC ceramic substrates are widely used in various applications: for instance in high brightness LED to increase the longevity because of its high heat radiation performance, Semiconductor equipment, in microwave wireless communication, military electronics, various sensor substrates, aerospace, railway transportation, electricity power and much more.
RT-CsI950, Evaporation coating plant is applied to CsI film deposition for X-Ray Imaging devices. It is an advanced technique to evaporate CsI on the screen to create high quality images. The high-resolution performance allows this application to be extremely efficient and disruptive in the medical instrument, nuclear energy industry, security checking and inspection, high energy physics subjects and more.
Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.
Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.
ROYAL TECHNOLOGY'S CULTURE
ROYAL's Vision: to be the worldwide famous brand supplier of providing total solutions to customers requirement.
ROYAL' Mission: protects the environment, saves our blue planet ; to improve labors tough working environment, enhance work efficiency, completely help owners to reduce production cost.
ROYAL's Philosophy: human-oriented, honest, innovative and make the greatest contribution to society.
ROYAL's Value: innovation, advanced technology’s R&D, serving China and worldwide's manufacturing industries.
ROYAL's Service: ONE-STOP service, with excellent technology and products, professional dedication to serve our customers.