DPC direct plating copper on Ceramic chips- RTSP1200-DPC

The PVD Direct Plating Silver on ceramic dielectric filters is an advanced coating technology applied with 5G base station and other semiconductors for electronic industries. One typical application is Ceramic Radiating Substrate. Silver / Copper conductive film deposition on Aluminum Oxide (Al2O3), AlN substrates by PVD vacuum sputtering technology, has above all one big advantage compared to traditional manufacturing methods: DBC LTCC HTCC, which has much lower production costs. Royal Technology’s team collaborated with our customer to develop the PVD Silver Plating process successfully applying with sputtering technology which can replace conventional liquid silver brushing process.

Typical Applications

• HBLED
• Substrates for solar concentrator cells
• Power semiconductor packaging including automotive motor control
• Hybrid and electric automobile power management electronics
• Packages for RF
• Microwave devices
• Ceramic dielectric filters for 5G Base station

Only to name a few, for more applications, please contact Royal Tech.

Technical Advantages

Large Capacity
Flexible Modules Design
Precised Manufacturing

The RTAS1215 batch Sputtering system is the upgraded version ,the newest system has several advantages:

Higher Efficient Process
1. Double sided coating is available by turnover fixture design
2. Up to 8 standard planar cathode flanges for multiple sources
3. Large capacity up to 2.2 ㎡ ceramic chips per cycle
4. Fully Automation, PLC+Touch Screen, ONE-touch control system

Lower Production Cost
1. Equipped with 2 sets magnetic suspension molecular pumps, fast starting time, free maintenance
2. Maximum heating power
3. Octagonal shape of chamber for optimum space using, up to 8 arc sources and 4 sputtering cathodes for fast deposition of coatings

Technical Specifications

Model: RTSP1200-DPC

Chamber Height (mm): 1500

Chamber diameter (mm): φ1200

Sputtering Cathodes Mounting Flange: 4

Ion Source Mounting Flange: 1

Arc Cathodes Mounting Flange: 8

Satellites (mm): 16 x Φ150

Pulsed Bias Power (KW): 36

Sputtering Power (KW): DC36 + MF36

Arc Power(KW): 8 x 5

Ion Source Power (KW): 5

Heating Power (KW): 36

Effective Coating Height (mm): 1020

Magnetic Suspension Molecular Pump: 2 x 3300 L/S

Roots Pump: 1 x 1000m³/h

Rotary Vane Pump: 1 x 300m³/h

Holding Pump: 1 x 60m³/h

Capacity: 2.2 ㎡

Installation Area ( L x W x H) mm: 4200*6000*3500

Insite

Built Time: Since 2016

Quantity: 3 sets

Location: China

Compared with the market huge demand, batch system's productivity is low; we have been dedicated developing the In-line sputtering system ( continues sputtering deposition line) with automatically robot loading/unloading devices. Anyone who is interested in this system, please contact our technician for more specifications.

Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.

 Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:

Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.

RTAS model,the arc and sputtering integrated series equipment can produce highly reflective black and bronze films specifically for high quality decorative coatings.

RTSP1200-FCEV, It is a sputtering system with PECVD process to deposit thin film on hydrogen fuel cell power modules. Fuel Cell Vehicles is the newest technology for the next generation of environmentally friendly cars. The main advantage and technological progress compared to commonly used batteries like dry cell need to undergo a recurring recharging process, but hydrogen fuel cell power modules only require Hydrogen and Oxygen reaction to generate power for driving.

RTSP1200-DPC,This coating system is exclusively used for the DPC (Direct Plating Copper) ceramic substrates process. The DPC ceramic substrates are widely used in various applications: for instance in high brightness LED to increase the longevity because of its high heat radiation performance, Semiconductor equipment, in microwave wireless communication, military electronics, various sensor substrates, aerospace, railway transportation, electricity power and much more.

RT-CsI950, Evaporation coating plant is applied to CsI film deposition for X-Ray Imaging devices. It is an advanced technique to evaporate CsI on the screen to create high quality images. The high-resolution performance allows this application to be extremely efficient and disruptive in the medical instrument, nuclear energy industry, security checking and inspection, high energy physics subjects and more.

Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.

     Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.

ROYAL TECHNOLOGY'S CULTURE

ROYAL's Vision:  to be the worldwide famous brand supplier of providing total solutions to customers requirement.

ROYAL' Mission: protects the environment, saves our blue planet ; to improve labors tough working environment, enhance work efficiency, completely help owners to reduce production cost.

ROYAL's Philosophy: human-oriented, honest, innovative and make the greatest contribution to society.

ROYAL's Value: innovation, advanced technology’s R&D, serving China and worldwide's manufacturing industries.

ROYAL's Service: ONE-STOP service, with excellent technology and products, professional dedication to serve our customers.