Product Details
6inch sic substrates ,6inch sic wafers, sic crystal ingots ,
sic crystal block ,sic semiconductor substrates,Silicon Carbide Wafer
6 inch diameter, Silicon Carbide (SiC) Substrate Specification | |
Grade | Zero MPD Grade | Production Grade | Research Grade | Dummy Grade |
|
Diameter | 150.0 mm±0.2mm |
|
ThicknessΔ | 350 μm±25μm or 500±25un |
|
Wafer Orientation | Off axis : 4.0° toward< 1120> ±0.5° for 4H-N On axis :
<0001>±0.5° for 6H-SI/4H-SI |
|
Primary Flat | {10-10}±5.0° |
|
Primary Flat Length | 47.5 mm±2.5 mm |
|
Edge exclusion | 3 mm |
|
TTV/Bow /Warp | ≤15μm /≤40μm /≤60μm |
|
Micropipe Density | ≤1 cm-2 | ≤5 cm-2 | ≤15 cm-2 | ≤100 cm-2 |
|
Resistivity | 4H-N | 0.015~0.028 Ω·cm |
|
4/6H-SI | ≥1E5 Ω·cm |
|
Roughness | Polish Ra≤1 nm |
|
CMP Ra≤0.5 nm |
|
Cracks by high intensity light | None | 1 allowed, ≤2 mm | Cumulative length ≤ 10mm, single length≤2mm |
|
Hex Plates by high intensity light | Cumulative area ≤1% | Cumulative area ≤2% | Cumulative area ≤5% |
|
Polytype Areas by high intensity light | None | Cumulative area≤2% | Cumulative area≤5% |
|
Scratches by high intensity light | 3 scratches to 1×wafer diameter cumulative length | 5 scratches to 1×wafer diameter cumulative length | 5 scratches to 1×wafer diameter cumulative length |
|
|
Edge chip | None | 3 allowed, ≤0.5 mm each | 5 allowed, ≤1 mm each |
|
Contamination by high intensity light | None |

Because the 6inch size crystal grow &process(lapped and polishing) technical difficulties,we just can provide the 6inch Dummy Grade as
common products in 30days and Productions Grade but needing to be
reserved for 90days.
About our company
SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai,
Which is the best city of China, and our factory is founded in Wuxi city in 2014.
We specialize in processing a varity of materials into wafers,
substrates and custiomized optical glass parts.components widely
used in electronics, optics, optoelectronics and many other fields.
We also have been working closely with many domestic and oversea
universities, research institutions and companies, provide
customized products and services for their R&D projects.
It's our vision to maintaining a good relationship of cooperation with our all
customers by our good reputatiaons.
Company Profile
SHANGHAI FAMOUS TRADE CO.,LTD
SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of
Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014.
We specialize in processing a varity of materials into
wafers, substrates and custiomized optical glass parts.components
widely used in electronics, optics, optoelectronics and many other
fields. We also have been working closely with many domestic and
oversea universities, research institutions and companies, provide
customized products and services for their R&D projects.
It's our vision to maintaining a good relationship of cooperation with our all
customers by our good reputatiaons.